The 7th ALD Symposium will be organized by ALD Lab Saxony and the working group R&D of Silicon Saxony, 10th of December 2018 in Dresden / Germany.
Registration: LINK
Location :
Technische Universität Dresden
- Werner-Hartmann-Bau -
Nöthnitzer Str. 66
01187 Dresden
Technische Universität Dresden
- Werner-Hartmann-Bau -
Nöthnitzer Str. 66
01187 Dresden
Program 14:00 - 18:00
Welcoming
Stefan Uhlig/Cool Silicon
ALD/CVD applications, equipment and precursors in high volume manufacturing
Dr. Jonas Sundqvist/ Fraunhofer IKTS
ALD activities within Research Fab Microelectronics Germany FMD
Bernd Hintze/ Forschungsfabrik Mikroelektronik Deutschland
Atomic layer deposition @ IFW
Andy Thomas/ Leibniz-Institut für Festkörper- und Werkstoffforschung
TSV-Transistor
Felix Winkler/ Technische Universität Dresden, Institut für Halbleiter und Mikrosysteme
BREAK (15:05-15:20)
Synthesis of self-assembled 3D nanostructures using metastable atomic layer deposition
Mario Ziegler/ Leibniz-Institut für Photonische Technologien Jena
ALD layers for reduced wear on micro cutting tools
Toni Junghans/ Westsächsische Hochschule Zwickau
Zr precursor screening for semiconductor applications
Monica Materano/ NamLab
WORLD CAFE (16:00-18:00)
Station 1 – the future of ALX 2019/2020
Station 2 – ALD R&D projects ideas
Station 3 – Internationalisation (players, cooperations, events etc.)
Wrap up world café
Stefan Uhlig/ Cool Silicon
Networking (18:00 - open end): After the official parts, we would be very happy if you accompany us to a trip over the 584. Dresdner Striezelmarkt 2018 and enjoy some networking with a hot cup of delicious mulled wine
Stefan Uhlig/Cool Silicon
ALD/CVD applications, equipment and precursors in high volume manufacturing
Dr. Jonas Sundqvist/ Fraunhofer IKTS
ALD activities within Research Fab Microelectronics Germany FMD
Bernd Hintze/ Forschungsfabrik Mikroelektronik Deutschland
Atomic layer deposition @ IFW
Andy Thomas/ Leibniz-Institut für Festkörper- und Werkstoffforschung
TSV-Transistor
Felix Winkler/ Technische Universität Dresden, Institut für Halbleiter und Mikrosysteme
BREAK (15:05-15:20)
Synthesis of self-assembled 3D nanostructures using metastable atomic layer deposition
Mario Ziegler/ Leibniz-Institut für Photonische Technologien Jena
ALD layers for reduced wear on micro cutting tools
Toni Junghans/ Westsächsische Hochschule Zwickau
Zr precursor screening for semiconductor applications
Monica Materano/ NamLab
WORLD CAFE (16:00-18:00)
Station 1 – the future of ALX 2019/2020
Station 2 – ALD R&D projects ideas
Station 3 – Internationalisation (players, cooperations, events etc.)
Wrap up world café
Stefan Uhlig/ Cool Silicon
Networking (18:00 - open end): After the official parts, we would be very happy if you accompany us to a trip over the 584. Dresdner Striezelmarkt 2018 and enjoy some networking with a hot cup of delicious mulled wine