Plenary Speaker - Jeff Elam (Argonne National Lab, USA)
- Eric Joseph (IBM, USA)
ALD Invited Speakers - Silvia Armini (IMEC, Belgium)
- Ageeth Bol (Eindhoven Univ. of Technology, Netherlands)
- Jolien Dendooven (Ghent Univ., Belgium)
- Eric Dickey (Lotus Applied Technology, USA)
- John Ekerdt (Univ.of Texas, Austin, USA)
- Fabio Grillo (ETH Zurich, Switzerland)
- Hyeongtag Jeon (Hanyang Univ., South Korea)
- Jessica Kachian (Intel, USA)
- Rajesh Krishnamurthy (TechInsights/Chipworks, Canada)
- Alex Martinson (Argonne National Lab, USA)
- Niloy Mukherjee (Eugenus, Inc., USA)
- Jin-Seong Park (Hanyang Univ., South Korea)
- Henrik Pedersen (Linkoping Univ., Sweden)
- Madhukar Rao (Versum Materials, USA)
- Dina Triyoso (Tokyo Electron, USA)
- Ginger Wheeler (U.S. Naval Research Lab, USA)
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ALE Invited Speakers - Tomoko Ito (Osaka Univ., Japan)
- Sabbir A. Khan (Niels Bohr Institute, Univ. of Copenhagen, Denmark)
- Nobuyuki Kuboi (Sony Semiconductor Solutions Corp., Japan)
- Xu Li (Univ. of Glasgow, UK)
- Alfredo Mameli (TNO-Holst Centre, The Netherlands)
- Angelique Raley (TEL Technology Center, America, USA)
- Kazunori Shinoda (Hitachi Ltd, Japan)
- Samantha Tan (Lam Research, USA)
Tutorial Speakers - Area-selective ALD for Semiconductor Manufacturing, Stacey Bent (Stanford Univ., USA)
- ALD for Battery Applications, Andy Sun (Western Univ., Canada)
- ALD for Catalysis, Rong Chen (Huazhong Univ. of Science and Technology, China)
- ALD for Photovoltaics, Bart Macco (Eindhoven Univ. of Technology, Netherlands)
- Plasma Based ALE, Thorsten Lill, (Lam Research, USA)
- Thermal Based ALE, Steve George (Univ. of Colorado at Boulder, USA)
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