JVSTA Call for papers ALD & ALE

Call for Research Articles

Atomic Layer Deposition and Atomic Layer Etching

 

Manuscript Deadline: November 1, 2018

 

 

This special topic collection is planned in collaboration with ALD 2018 and the ALE 2018 Workshop to be held in Incheon, South Korea during July 29—August 1, 2018. The Special Topic Collection will feature sections dedicated to the science and technology of atomic layer controlled deposition and to the science and technology of controlled etching of thin films. While a significant number of articles will be based on material presented at ALD 2018 and the ALE 2018 Workshop, research articles on ALD and ALE but not presented at this conference are also welcome. The special topic collection will be open to all articles on the science and technology of ALD and ALE.


Authors are encouraged to use the JVST templates. Online, you will have an opportunity to tell us that your paper is a part of the Special Topic Collection by choosing either the “ALD Special Topic Collection” or the “ALE Special Topic Collection.

Submit to JVST A

JVST Article Template