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The SEMATECH ALD equipment forum will run from February 17th-20th in San Diego and will focus on the following topics:
- Equipment Cost of Ownership
- Defect Reduction
- Precursor Qualification
- Maintenance Best Practice
- Process Control / FDC
- Equipment Cost of Ownership
- Defect Reduction
- Precursor Qualification
- Maintenance Best Practice
- Process Control / FDC
This forum is being supported by HKE, TEL and others; with high volume manufacturing Fab engineers participating from: Intel, IBM, Samsung, UMC, Winbond, Macronix, GlobalFoundries, TSMC, Renesas, Freescale and HP. We are focusing on both oxides and metal nitrides.
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