Tuesday, December 6, 2016

Joint EuroCVD-Baltic ALD 2017: Abstract submission open!

The abstract submission for the Joint EuroCVD-BalticALD conference in Linköping, Sweden 11-14 June 2017 is now open.
 
Abstract deadline is 10 January 2017

Topics for this conference include:  
  • Precursors (design, synthesis and delivery)
  • Modelling (surface, gas phase, thermo chemistry, quantum chemistry, multi scale)
  • Process Equipment (reactors)
  • Energy Enhanced processes (Plasma, Hot wire, Photon)
  • Nanomaterials (particles, 2D-materials, nano structures)
  • In-situ monitoring (QCM, Ellipsometry, IR, syncrotron)
  • Oxides (TCO, high-k, hard coatings, thermal barriers)
  • Nitrides (semiconductors, conductors, hard coatings)
  • Carbides (hard coatings, semiconductors)Elemental films (metals, amorphous carbon)Emerging materials (hybrid MLD/ALD, sulfides)