Strem Chemicals offers ALD & CVD Precursor bubblers and ampoules for R&D and high volume manufacturing

Strem Chemicals, Inc. manufactures and markets specialty chemicals of high purity. Their products are used for research and development, as well as commercial scale applications, especially in the pharmaceutical, microelectronic and chemical/petrochemical industries.

Strem Chemicals has more than fifty years of experience in manufacturing inorganic and organometallic chemicals and probably the world´s most extensive product offering of MOCVD, CVD, and ALD precursors. Continually adding new products for this dynamic and exciting field, their range of products is presented in the on-line catalog (LINK) and include:

• Metal alkyls
• Metal alkylamides and alkylimides
• Metal amidinates
• Metal alkoxides
• Metal β-diketonates
• Metal cyclopentadienyls
• Metal halides
• Volatile organometallics
• Volatile metal carbonyls
• Fluorinated derivatives
• Electronic grade chemicals
• Single source precursors for mixed metal oxides

The standard and absolutely safest way to transport and deliver highly reactive ALD & CVD precursors is in stainless steel ampoules. These are often referred to as bubblers since in many cases they are fitted with a dip tube on the inlet allowing efficient vapor delivery by an inert carrier gas like N2, He or Ar. These bubblers are readily fitted with seal tight valves and VCR vacuum fittings for easy and safe installation directly on the ALD/CVD tool gas box by a qualified person.

In addition to their 450+ precursors, Strem Chemicals offer a variety of electropolished stainless steel bubblers at capacities ranging from 150ml to 3000ml. These bubblers are available in horizontal-in-line and vertical configurations. While standard bubblers are equipped with diaphragm valves rated to 121°C (PCTFE stem tips), Strem also supplies bubblers with high temperature bellows valves rated to 315°C. DOT and UN approved configurations are available.

An assortment of cylinders for ALD can be found in the on-line catalog (LINK) with standard, high-temperature and high-purity options. In addition, Strem Chemicals provides additional services to our customers for their MOCVD, CVD & ALD needs such as:

• Cylinder/Bubbler Cleaning
• Precursor Filling & Refilling
• Prepackaged Precursors in ALD Cylinders

Above, are small sized vapor draw ampoules for research amounts of precursors. The sleek design affords a very compact precursor delivery system.

Bubbler specifications 

Strem Chemicals allows you to match a bubbler to your current ALD or CVD tool gas box. The bubbler can be specified using a vast range of types, dimensions and valve configurations. Depending on the precursor to be supplied the valves, materials and dip tube configuration can be optimized for the most efficient precursor delivery even at elevated temperatures (up to 315 °C).

Strem offers four of the most popular bubbler designs, and can be made to fit inside most of the ALD/CVD tools on the market today as well many custom build systems.

Once you decide your preference of bubbler, you will need to measure the critical dimensions (A to E), such as volume, temperature operation and dip tube configuration. Then you´re ready to order the ideal bubbler filled with your desired precursor. By following the guide you can be sure that the bubbler will fit like a glove into your precursor cabinet!

Example of a bubbler configuration sheet for a stainless steel bubbler fitted with high temperature valves. 

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Promotional Blog for Strem Chemicals, Inc.
Researched, produced & written by BALD Engineering AB, Stockholm, 2019-02-21
Abhishekkumar Thakur, Jonas Sundqvist
www.baldengineering.com

NCD Contracted with Risen Energy to supply 1.6GW solar cell ALD equipment

NCD recently signed the largest contract with Risen Energy, a Chinese solar cell manufacturer, to provide 1.6 GW solar cell manufacturing equipment in the next six months. This is a repeat order following the last purchase, so it indicates that the superiority and reliability of NCD’s ALD equipment has been fully proven to the customer.

This system is Lucida GS Series with Automation, the main product of NCD's solar division. By applying Lucida GS Series in the production of solar cells, customers chan dramatically lower the production cost of high efficiency solar cells due to the high-volume productivity, high yield, efficient gas consumption and low maintenance cost compared to competitors.

NCD will have continually made efforts to help our customers successful together and to become the world’s best ALD technology specialized company.

 

(Lucida GS Series + Automation)

Critical Materials Business and Technology Information 2019

4th Annual Critical Materials Council (CMC) Conference April 25-26 in Saratoga Springs, New York a must-attend for business and technology professionals concerned with global supply-chains for semiconductor manufacturing.

TECHCET will host the 4th annual Critical Materials Council (CMC) Conference April 25-26 at the Saratoga Hotel and Casino in Saratoga Springs, New York. At the CMC Conference, business visionaries and manufacturing technologists gather to address current and future materials challenges. The latest forecasts on market drivers including trade issues, along with technical issues facing the global materials supply-chain, will be shown. 

 

The public CMC Conference follows private CMC face-to-face meetings to be held April 23-24, 2019 at GlobalFoundries in Malta, New York. Themes are centered around the needs of the Critical Materials Council and the global IC fabrication industry. While executive conferences typically focus on the "what" and "why" of materials technologies, this conference will discuss "how" new materials can be controllably, safely, and cost-effectively used in fabs.

The CMC Conference this year will feature a keynote presentation on "International Supply-Chain Management Challenges," by Dr. John Pellerin, Deputy CTO and VP of Worldwide R&D of GlobalFoundries.

Other featured presentations include: 

• Tim Yeakley, ESH Policy Manager, Texas Instruments, on "Global Materials Regulation Issues,"
• Dr. Karl Robinson, Director of Process Engineering, IMEC, on "Materials Engineering in CMOS and Beyond-CMOS Applications,"
• Dr. Bryan Rice, VP of Product Integration, Inpria Corp., on "EUV Photolithography Materials Integration,"
• G. Dan Hutcheson, CEO, VLSI Research, on "Slowdown: When did it start? What drove it? and When will the recovery come?" and
• Gus Richard, Managing Director, Northland Securities, on "Macroeconomics & Drivers Influencing the Electronics Industry."

Attendees from fabs, OEMs, and materials suppliers alike will have the opportunity to interact with the presenters and colleagues, to gain insights into best-practices of the entire supply-chain.

Register now at the early-bird rate of just $395: https://cmcfabs.org/cmc-events/

ABOUT CMC: The Critical Materials Council (CMC) of Semiconductor Fabricators (CMCFabs.org) is a membership-based organization that works to anticipate and solve critical materials issues in a pre-competitive environment. The CMC is a business unit of TECHCET, and includes materials supplier Associate Members.

ABOUT TECHCET: TECHCET CA LLC is an advisory services firm focused on process materials supply-chains, electronic materials business, and materials market analysis for the semiconductor, display, solar/PV, and LED industries. Since 2000, the company has been responsible for producing the SEMATECH Critical Material Reports™, covering silicon wafers, semiconductor gases, wet chemicals, CMP consumables, Photoresists, and ALD/CVD Precursors. For additional information about reports, market briefings, CMC membership, or custom consulting please contact info@cmcfabs.org, +1-480-332-8336, or go to http://www.techcet.com or http://www.cmcfabs.org.

Strong opening of the EFDS ALD for Industry in Berlin

This year we have a strong opening of the EFDS ALD for Industry with Prof. Kessels giving the Keynote follwoing up with strong opresenattions form Infineon, Picosun, Veeco, IHP, Euris/Arradiance and Air Liquide. (LINK)

 

The new ASM XP8 QCM up to 16 chamber ALD/CVD tool

Here is a photo out of a Korean web page of the new massive ASM XP8 QCM. Q stands for quad meaning the central wafer vacuum handler can dock 4 chambers per slot or "just" two as earlier on the XP8 up to 16 chamber ALD/CVD tool [LINK].

ASM International enhances ALD productivity with new 300 mm XP8 Quad Chamber Module [LINK]

10 steps to successfully develop, optimize and characterize ALD recipes

Here is an excellent blog by Atomic Limits for all of you ALD process engineers and scientists with very nice graphics as well : Atomic Layer Deposition Process Development - 10 steps to successfully develop, optimize and characterize ALD recipes [LINK].