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The scientific and technological interest in atomic layer deposition (ALD) and atomic layer etching (ALE) has been surging in the last decade and the sheer volume of ALD and ALE papers can make it difficult to get a clear overview. Now AtomicLimits and Prof. Kessels launched the ALD & ALE ReviewBas in Dresden at the annual EFDS ALD for Industry conference.
Link to the new site: ALD & ALE reviews – Atomic Limits
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