Sunday, October 3, 2021

Call for Research ArticlesSpecial Topic Collections:Atomic Layer Deposition and Atomic Layer Etching

Call for Research Articles
Special Topic Collections:
Atomic Layer Deposition and Atomic Layer Etching
Manuscript Deadline: November 15, 2021

The Journal of Vacuum Science and Technology A is soliciting research articles for publication in Special Topic Collections on Atomic Layer Deposition and Atomic Layer Etching. These special topic collections are planned in collaboration with the annual ALD meeting and ALE Workshop.

Each year, in concert with the annual Atomic Layer Deposition (ALD) meeting and Atomic Layer Etching (ALE) Workshop, the Journal of Vacuum Science and Technology A publishes collections of articles covering the most recent developments and experimental studies in ALD and ALE. These ALD and ALE Special Topic Collections will include papers presented at the annual meeting and Workshop, as well as other ALD and ALE research articles that were not presented at the conference but are submitted to the collections. The collections feature articles dedicated to the science and technology of atomic layer controlled deposition and etching.




Authors are encouraged to use the JVST article template. During submission, you will have an opportunity to tell us that your paper is a part of one of the Collections by choosing either the Special Topic or Conference Collection on “Atomic Layer Deposition (ALD)” or “Atomic Layer Etching (ALE).” See recent collections: ALD 2021, ALE 2021, ALD 2020, and ALE 2020.

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