Intel 10 nm Logic Process Analysis (Cannon Lake) by TechInsight

[TechInsight, LINK] TechInsights has found the long-awaited Cannon Lake - the Intel 10 nm logic process inside the i3-8121U CPU, used in the Lenovo IdeaPad330.

 
This innovation boasts the following:

• Logic transistor density of 100.8 mega transistors per mm², increasing 10nm density 2.7X over the 14nm node
• Utilizes third generation FinFET technology
• Minimum gate pitch of Intel’s 10 nm process shrinks from 70 nm to 54 nm
• Minimum metal pitch shrinks from 52 nm to 36 nm

Process Highlights:

• Deepest scaled pitches of current 10 nm and upcoming 7 nm technologies
• First Co metallization and Ru usage in BEOL
• New self-aligned patterning schemes at contact and BEOL

Design Highlights:

• Hyperscaling via 6.2-Track high density library
• Contact on active gate (COAG) cell-level usage

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By Abhishekkumar Thakur