The
"Made in China 2025 Strategy" includes Atomic Layer Deposition (ALD)
for the semiconductor industry and especially Memory manufacturing
(3DNAND Flash). This information was given by as
part of a briefing at ISS2017 "China Semi Equipment Momentum and AMEC
Briefing", by Gerald Z. Yin, Chairman of the Board and CEO of AMEC [LINK], which have been reported by EE Times [LINK]
As further background, in November 2015 (after the "Made in China" announcement, May 19, 2015, LINK) the China Integrated Circuit Industry Investment Fund Co. Ltd., together with Advanced Micro-Fabrication Equipment Inc.
(AMEC) and Suzhou Juyuan Dongfang Investment Fund (Limited Partnership) announced that they have invested US$42 million in Piotech Co. Limited. [Source]
Shenyang Piotech Co., Ltd, 300 mm ALD equipment [source]
Piotech is Headquartered in Shenyang, China,
and manufacture CVD equipment. Recently Piotech has also announced a
ALD business segment and products for 300 mm wafer processing. The
ALD tool developed by Piotechy can be used for Semiconductor and
Advanced Packaging (TSV) applications. At present high and low
temperature SiO2, SiN, and Al2O3 is offered that will soon expand to
High-k
and metal nitride ALD technology. The ALD chambers
can be combined with the production capacity of the PF-300T PECVD
platform.
Piotech has chinese active IP [ALD (atomic layer deposition) equipment , CN204080102U] on a very interesting 6 wafer station chamber that can be clustered. By this it is clear that the company has a clear strategy to take market share in ALD since the competition in ALD for 3DNAND have 5 to 6 wafer capability (Jusung, Applied Materials & Tokyo Electron). It is not known if the 300mm ALD tool above has these type of multi wafer chambers.
Besides ALD and Piotech AMEC is alo investing in Bejing NMC (Etch, PVD and APCVD) and Bejing Sevenstar (Furnace & Wafer Cleaning), who also have some filed IP in ALD.
Piotech has chinese active IP [ALD (atomic layer deposition) equipment , CN204080102U] on a very interesting 6 wafer station chamber that can be clustered. By this it is clear that the company has a clear strategy to take market share in ALD since the competition in ALD for 3DNAND have 5 to 6 wafer capability (Jusung, Applied Materials & Tokyo Electron). It is not known if the 300mm ALD tool above has these type of multi wafer chambers.
Besides ALD and Piotech AMEC is alo investing in Bejing NMC (Etch, PVD and APCVD) and Bejing Sevenstar (Furnace & Wafer Cleaning), who also have some filed IP in ALD.
China Defends Big Chip Bet: Hual & AMEC Execs Share Views at SEMI ISS 2017 #SEMI_ISS #semiconductor @eetimes https://t.co/FwNQdkXLYt pic.twitter.com/iZzIeQw2Kh— SEMICON (@SEMIexpos) January 12, 2017
Gerald Yin CEO of China-based semi equipment maker AMEC at #SEMI_ISS: ~30 front end China semi equipment companies formed in last 10 years pic.twitter.com/HlSUi5IcCi— Jonathan Davis, SEMI (@SEMI_Advocacy) January 11, 2017
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