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According to a recent press release from Picosun Oy, leading supplier of Atomic Layer
Deposition (ALD) thin film coating solutions for industrial production,
delivers several new PICOPLATFORM™ cluster tools for high volume ALD
manufacturing in semiconductor industries.
The
PICOPLATFORM™ cluster systems have quickly become a favorite of
Picosun's production customers. The systems, designed to accommodate
wafers up to 300 mm size, comprise Picosun's state-of-the-art
technological solutions and unparalleled ALD knowhow with the most
extensive selection of vacuum loading solutions for single wafer and
batch processing. This makes the PICOPLATFORM™ cluster tools ideal for
e.g. III-V semiconductor, LED, and MEMS device manufacturing. The now
sold PICOPLATFORM™ cluster tools will be installed in the production
facilities of leading, multi-billion semiconductor device manufacturers
in USA and Asia.
"The
PICOPLATFORM™ product family is one of the strongholds of our
industrial ALD technology. The repeat sales of these systems to our core
markets such as microelectronic component and sensor manufacturing
prove again the unmatched level of our ALD equipment design and our
excellence in hardware integration, software, and process development.
Combined with our leading selection of automated batch handling systems
designed to fulfill the strictest requirements of the semiconductor
industries, the PICOPLATFORM™ cluster systems offer the most
comprehensive turn-key solutions to fast, productive, and cost-efficient
ALD manufacturing," states Mr. Juhana Kostamo, Managing Director of Picosun.
Mr. Juhana Kostamo, Managing Director of Picosun.
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