Plasma ALD – A discussion of mechanisms – Commemorating the career of John Coburn

New Blog post by Prof. Kessels: Commemorating the work of John Coburn, how it influenced our work at TU Eindhoven in the field of ALD, and their latest work related to the surface recombination of plasma radicals and its influence on conformality of plasma-based ALD.

AtomicLimits: Plasma ALD – A discussion of mechanisms – Commemorating the career of John Coburn (LINK)