Sunday, October 28, 2018

Fabrication of buried nanostructures with flat surface by ALD


Fabrication of buried nanostructures by atomic layer deposition (Open Access)

Rizwan Ali, Muhammad Rizwan Saleem, Matthieu Roussey, Jari Turunen & Seppo Honkanen Scientific Reportsvolume 8, Article number: 15098 (2018) 

We present a method for fabricating buried nanostructures by growing a dielectric cover layer on a corrugated surface profile by atomic layer deposition of TiO2. Selecting appropriate process parameters, the conformal growth of TiO2 results in a smooth, nearly flat-top surface of the structure. Such a hard surface can be easily cleaned without damage, making the nanostructure reusable after contamination. The technique has wide applicability in resonance-domain diffractive optics and in realization of quasi-planar metamaterials. We discuss design issues of such optical elements and demonstrate the method by fabricating narrow-band spectral filters based on the guided-mode resonance effect. These elements have strong potential for, e.g., sensing applications in harsh conditions.


Fabrication process of ALD-TiO2 buried guided mode resonance filters (GMRFs). Shared under Creative Commons Attribution 4.0 International License From: Fabrication of buried nanostructures by atomic layer deposition