Saturday, October 20, 2018

Materials Matters (TM) topical issue on Atomic Layer Deposition

Here is a Materials Matters(TM) topical issue on Atomic Layer Deposition with interesting papers on ALD - especially the one on Group 11 metals. That is ALD of copper, silver and gold by Prof. Barry.

Materials Matters(TM) - Atomic Layer Deposition - Nanomanufacturing with ALD (LINK)
  • NANOCOMPOSITE COATINGS with Tunable Properties Prepared by Atomic Layer Deposition
  • SILICON NITRIDE ATOMIC LAYER DEPOSITION: A Brief Review of Precursor Chemistry
  • GROUP 11 THIN FILMS by Atomic Layer Deposition
  • FEW MONOLAYER ATOMIC LAYER DEPOSITION on Surfaces and Interfaces for Energy Applications