Saturday, September 1, 2018

PEALD - Alumina Systems & Plasway Technologies rewarded "Best Component Award" at CERAMITEC 2018

Alumina Systems GmbH was awarded the "Best Component Award" for its development of a ceramic gas distributor ring. For the first time this year, the prize was awarded by the trade magazine "Ceramic Applications". At the CERAMITEC 2018 trade fair in Munich.


The award-winning component is a ceramic distribution ring for PEALD (Plasma Enhanced Atomic Layer Deposition) processes. The aluminum oxide ring has a diameter of 380 mm and consists of three horizontally divided rings, which are joined with glass solder. In addition, 3-D printed ceramic nozzles made of 99.99% Al2O3 have been soldered in at the same time for internal gas distribution. The ring can supply 2 gases (precursors) at the same time or sequentially into a 300 mm PEALD chamber.



The managing director of Alumina Systems GmbH, Dr. med. Holger Wampers (left) and development partner and customer Stephan Wege, managing director of Plasway Technologies GmbH.

To make it even more complicated, the gas connection for the precursors is made by a titanium tube, which is then soldered to two 3D-printed stainless steel tubes. Both metal solderings are attached via a downstream active soldering. All joining operations are cascaded in the temperature control, i. the process with the highest temperature must first be carried out, further processes must always be lower in temperature so that previous solder joints do not break up again. Besides from the metal parts, the components and joining processes were manufactured or carried out at Alumina Systems in Redwitz. "We have used all our know-how in this component," emphasized Dr. med. Wampers and added: "The horizontally split rings must be in relatively close tolerances for flatness and roundness after sintering, otherwise this can not be corrected with the subsequent grinding process for technological reasons. This is not so easy to achieve due to the shrinkage process of around 20%. Another challenge was the Laval nozzles, which could not have been produced without a 3-D printer. In addition, the entire ring is He leak-tight to 10-8 mbar · L / s "



For more details you can browse the current issue of Ceramic Applications 2/2018 : LINK
As well as Plasway Technologies GmbH (LINK), Fraunhofer IKTS Thin Film Technology Group (LINK) and Alumina Systems news: LINK (German)