Thursday, November 2, 2017

UPDATE: ALD Lab Saxony Symposium at SEMICON EUROPA

The ALD Lab Saxony Symposium is a yearly side event of the SEMICON Europe organized since 2012. The Symposium is intended to improve visibility of the Atomic Layer Deposition technique and to promote networking between academics, institutes and industry. The symposium gives an overview of various research and development topics as well as examples of ALD applications in R&D and manufacturing. 
 

Date: 14.11.2017
Place: SEMICON Europa, Conference Room A12

SESSION 1 – EQUIPMENT AND APPLICATIONS

10:00 Welcome, Prof. Bartha, TU Dresden (Germany)
10:20 ALD for Production, Dr. Christoph Hossbach, Picosun (Finland/Germany)
10:40 Fabrication of 3D microstructures from micron-sized powder using ALD and possible applications for MEMS”, Dr. Thomas Lisec, Fraunhofer ISIT (Germany)
11:00 ALD Coatings on Steel: Defect Density and Corrosion Protection, Tim Poljanšek, Robert Bosch GmbH (German)
11:20 Passivation, Capacitors or 3D-Structures – Outline the Possibilities of ALD, Dr. Dorothee Dietz, Fraunhofer IMS (Germany)
11:40 Antireflection Coatings by Atomic Layer Deposition, Dr. Kristin Pfeiffer, Fraunhofer IOF (Germany)

12:00 Lunch and Networking 

Vorspeisen: 
Salat Antipasti, Austernpilzen, Ruccolapesto, Chiabattabrot, Tomaten, Mozzarella, Balsamico und Basilicum

Haptgänge: 
- Meditiraner Kalbstafelspitz, Gemüse der Saison und Kartoffelgratin
- Tortellini Ricotta Spinat, Salbeibutter und Parmesan mit Mozarella

Dessert:
Panna Cotta, Schwarz-weiß und Fruchtspiegel

SESSION 2 – PRECURSORS, PRECURSOR DELIVERY, METROLOGY AND SIMULATIONS

13:00 ALD equipment and precursors for high volume manufacturing, Dr. Jonas Sundqvist, Fraunhofer IKTS (Germany)
13:20 Precursor supply chain support, Dr. Simon Rushworth, EpiValence (UK)
13:40 Electronics: a key market for Umicore – a key partner for the market,  Dr. Oliver Briel, Umicore (Germany)
14:00 Precursor systems delivery for ALD, n.n., SEMPA Systems GmbH (Germany)
14:20 ALD process monitoring with quartz crystal microbalances,  Dr. Martin Knaut, TU Dresden (Germany)
14:40 Title to be given, n.n., Veeco CNT (USA)
15:00 ALD process optimization using computational fluid dynamics,  Linda Jäckel, Fraunhofer ENAS (Germany) 
 
The syposium is organized and facilitated by:
 
ALD Lab Saxony: IHM TU-Dresden & Fraunhofer IKTS and BALD Enginering