SparkNano's Spatial ALD tool decreases the of Iridium while increasing the production capacity of electrolyzers for green hydrogen

SparkNano's Spatial ALD tool decreases the cost and use of scarce materials like Iridium while increasing the production capacity of electrolyzers for green hydrogen.

For more detail about SparkNanos lab-to-fab product portfolio, you can download the complete spec sheet for the Labline Series here: LabLine Series — SparkNano | Spatial Atomic Layer Deposition (ALD) technology (spark-nano.com)

Technical features (12 inch system)

Substrate types flat substrates like polymer and metal foils, wafers, glass and porous substrates

Substrate size

A free envelope of 320 mm x 360 mm x 5 mm is available. In this volume any flat substrate can be placed with a substrate specific holder

Process

Both thermal and plasma enhanced s-ALD