Saturday, June 12, 2021

Vinova fund Swedish AlixLabs Breakthrough green technology in Nanostructures Miniaturization for Electronic Chips

Vinnova has decided to grant AlixLabs application to Innovative Startups step 2 "Breakthrough green technology in Nanostructures Miniaturization for Electronic Chips" in the spring of 2021. 140 applications were received for the call, of which 35 were given grants. The assessment is based on a weighting of the six main criteria Relevance, Potential, Team, Implementation, Sustainability, and Gender Equality. The applications have been assessed in competition with each other. AlixLabs application was judged to meet the criteria to a great extent. 

AlixLabs aim to validate our breakthrough green technology for nanofabrication of nanostructures for applications in electronic chips. It is to demonstrate that Alixlabs' method is technically viable for the production of low dimensional transistors down to 2 nm node size, in line with the newly designed European Flagship "A European Initiative on Processors and semiconductor technologies" (LINK) to develop next-generation chips and 2 nm technology with €146.5 B, supported by 22 EU members. This demonstration will minimize the risks for AlixLabs entering the semiconductor industry market and ecosystem.

Miniaturization of electronic components, known as Moore's law, is fundamental to the entire IT explosion leading to the fast processing of data. Production of sub 10 nm chips requires advanced equipment such as extreme UV lithography (EUVL) tools, costing over €100 million, not affordable to all manufacturing companies or adding extreme investment cost for those companies still in the scaling race. Our innovative patented technology (WO2017157902A1) enables miniaturization without requiring or reducing the number of process steps using costly EUVL. This way, less financially powerful manufacturers (fabs) can get back to semiconductor production chains on level terms with large competitors from the USA and Asia. Our technology uses Atomic Layer Etching (ALE) for pitch splitting of nanostructures, which allows for efficient and high-volume nanopatterning and offers to reduce operating cost up to 35 - 50% and energy use and greenhouse emissions by 25 - 50% per Lithography mask layer requiring advanced Immersion base multiple patterning technology or EUVL single and double exposure.


We envision two breakthrough developments in this project:

(1) Application of ALE pitch splitting nanofabrication for electronic chip manufacturing down to 2 nm Foundry node size
(2) Demonstration of first transistors produced by ALE pitch splitting

Vinnova is the Swedish government agency that administers state funding for research and development. The agency's mission as defined by the government is to promote the development of efficient and innovative Swedish systems within the areas of technology, transportation, communication and labour.

About AlixLabs AB:

AlixLabs ( is an innovative startup enabling the semiconductor industry to scale down Logic and Memory components in a cost-effective manner by the use of ALE Pitch Splitting (APS).

Background Information:


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