New ALD chemistry for ultra-thin gas sensors

[Phys.org LINK] The application of zinc oxide layers in industry is manifold and ranges from the protection of degradable goods to the detection of toxic nitrogen oxide gas. Such layers can be deposited by atomic layer deposition (ALD) which employs typically chemical compounds, or simply precursors, which ignite immediately upon contact with air, i.e. are highly pyrophoric. An interdisciplinary research team at Ruhr-Universität Bochum (RUB) has now established a new fabrication process based on a non-pyrophoric zinc precursor that can be processed at temperatures low enough to allow plastics to be coated. The team published their report in the journal Small.

Lukas Mai – he is reflected in a thin film – and Anjana Devi. Credit: RUB, Marquard

More information: Lukas Mai et al. Zinc Oxide: From Precursor Chemistry to Gas Sensors: Plasma‐Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications (Small 22/2020), Small (2020). DOI: 10.1002/smll.202070122