[BENEQ] The challenge when coating 3D optics is to deposit the coating with high
uniformity over an arbitrary topology in a simple manner. Commonly used
techniques so called line-of-sight methods cause a non-uniform
thickness distribution and shadowing effects. To alleviate this problem
extensive mechanical work and process optimization is required, and this
may still not lead to a sufficiently homogeneous film deposition. ALD
overcomes those constraints and has proven its suitability for high
precision pinhole free films, where the challenge is not only to achieve
uniformity over a large scale, but to coat conformally over high aspect
ratio structures of arbitrary shapes.
More information: Anti-reflective optical coatings (LINK)
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