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This week at the EFDS ALD for Industry Conference, Prof. Kessels from TU Eindhoven (NL) launched the Atomic Limits online database for ALD processes. The interface to the database is based on an awesome periodic table for easy navigation (based on the R. Puurunen 2005 JAP review).
As reported on the Atomic Limits blog, the data in the database is based on the data in the papers by: Riikka Puurunen, J. Appl. Phys. 97, 121301 (2005) and Ville Miikkulainen, Markku Leskelä, Mikko Ritala, and Riikka Puurunen, J. Appl. Phys. 113, 021301 (2013). Other major additions were based on the reviews by Harm Knoops, Tahsin Faraz, Karsten Arts and Erwin Kessels, to be published in J. Vac. Sci. Technol. A 37 (2019) and Adrie Mackus, Joel Schneider, Callisto MacIsaac, Jon Baker and Stacey Bent, Chem. Mater. 31, 1142 (2019).
As reported on the Atomic Limits blog, the data in the database is based on the data in the papers by: Riikka Puurunen, J. Appl. Phys. 97, 121301 (2005) and Ville Miikkulainen, Markku Leskelä, Mikko Ritala, and Riikka Puurunen, J. Appl. Phys. 113, 021301 (2013). Other major additions were based on the reviews by Harm Knoops, Tahsin Faraz, Karsten Arts and Erwin Kessels, to be published in J. Vac. Sci. Technol. A 37 (2019) and Adrie Mackus, Joel Schneider, Callisto MacIsaac, Jon Baker and Stacey Bent, Chem. Mater. 31, 1142 (2019).
Atomic Limits ALD Database LINK
Screen capture from the awesome periodic table of ALD with direct links to the refernces in the database (atomiclimits.com).
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