Roger Bosch and Prof. Kessels from TU Eindhoven just recently published a fantastic blog post on Atomic Limits covering the Tutorial “In situ
Studies of ALD Processes & Reaction Mechanisms” that Prof. Kessels presented at the recent ALD 2018 Conference Incheon, South Korea (July 29 – August 1, 2018.
Please follow these links and enlighten your self on the follwoing topics:
- Quartz crystal microbalance
- Spectroscopic ellipsometry
- Quadrupole mass spectrometry
- Gas phase infrared spectroscopy
- Surface infrared spectroscopy
- Optical emission spectroscopy
Image from www.atomiclimits.com
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