Overview of In situ Studies of ALD Processes & Reaction Mechanisms

Roger Bosch and Prof. Kessels from TU Eindhoven just recently published a fantastic blog post on Atomic Limits covering the Tutorial “In situ Studies of ALD Processes & Reaction Mechanisms” that Prof. Kessels presented at the recent ALD 2018 Conference Incheon, South Korea (July 29 – August 1, 2018.

Please follow these links and enlighten your self on the follwoing topics:

• Quartz crystal microbalance
• Spectroscopic ellipsometry
• Quadrupole mass spectrometry
• Gas phase infrared spectroscopy
• Surface infrared spectroscopy
• Optical emission spectroscopy

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