The 3rd Annual Seminar on Finnish Centre of Excellence in ALD on March 19, 2015.

The 3rd Annual Seminar on Finnish Centre of Excellence in Atomic Layer Deposition will be held during ChemBio Finland 2015 symposium on March 19, 2015. The seminar is free, and everyone is welcome to participate!

We offer the possibility for all participants to present their own ALD related work during the seminar in poster format. If you wish to bring a poster, please inform us beforehand by sending an email to Emma Salmi (University of Helsinki; forename.surname(at)helsinki.fi) by February 15, 2015.

The seminar program will consists of invited lectures given by two foreign and two Finnish lecturers and six shorter presentations given by the researchers of the ALD Centre of Excellence. The presentations will cover the areas of ALDCoE which are development of new chemistry and thin film processes for materials applicable in microelectronics and energy technologies.

Finnish Symposium on Atomic Layer Deposition
Chairman: Prof. Markku Leskelä, University of Helsinki

• 9.20 Finnish Centre of Excellence in Atomic Layer Deposition
Prof. Markku Leskelä, University of Helsinki

• 9.30 Atomic Layer Deposition for Semiconductor Roadmap Challenges
Dr. Jan Willem Maes (ASM International, The Netherlands)

• 10.05 ALD tunable resistance coatings: growth and applications
Dr. Jeff Elam, Argonne National Laboratories, USA

• Coffee break

• 11.10 Observing thin film conformality with VTT's microscopic lateral high-aspect-ratio test structures
Dr. Riikka Puurunen (VTT)

• 11.30 Thin films by photo-assisted ALD
Dr. Ville Miikkulainen (University of Helsinki)

• 11.50 The characterization of multiferroic ALD grown BFO films
Dr. Pasi Jalkanen (University of Helsinki)

• Lunch break

• 13.30 Molecular Layer Deposition
Prof. Maarit Karppinen, Aalto University

• 13.55 ALD for metallization
Mr. Juhana Kostamo, Managing director, Picosun Oy

• Coffee break

• 14.40 Porous silicon supercapacitors
Prof. Jouni Ahopelto (VTT)

• 15.00 Composite TiO₂ photocatalysts by ALD – fundamental research towards water decontamination
Dr. Jani Hämäläinen (University of Helsinki)

• 15.20 ALD of 2D materials – opportunities and challenges
MSc Tiina Sarnet (University of Helsinki)