Anti-reflective optical coatings by ALD

[BENEQ] The challenge when coating 3D optics is to deposit the coating with high uniformity over an arbitrary topology in a simple manner. Commonly used techniques so called line-of-sight methods cause a non-uniform thickness distribution and shadowing effects. To alleviate this problem extensive mechanical work and process optimization is required, and this may still not lead to a sufficiently homogeneous film deposition. ALD overcomes those constraints and has proven its suitability for high precision pinhole free films, where the challenge is not only to achieve uniformity over a large scale, but to coat conformally over high aspect ratio structures of arbitrary shapes.

More information: Anti-reflective optical coatings (LINK)