Thursday, August 2, 2018

Overview of In situ Studies of ALD Processes & Reaction Mechanisms

Roger Bosch and Prof. Kessels from TU Eindhoven just recently published a fantastic blog post on Atomic Limits covering the Tutorial “In situ Studies of ALD Processes & Reaction Mechanisms” that Prof. Kessels presented at the recent ALD 2018 Conference Incheon, South Korea (July 29 – August 1, 2018.

Please follow these links and enlighten your self on the follwoing topics: