Chinesse reserachers from Jilin University reports in Nature Scientific Reposts on Zircone PEALD/MLD encapsulation üprocess for OLED. Chen, Z. et al. published "Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes" Sci. Rep. 7, 40061; doi: 10.1038/srep40061 (2017).
They used a PEALD chamber from Kemicro (PEALD-150A, Ke-Micro) to deposit the hybrid ZrO2/zircone nanolaminate was deposited using a remote Plasma set up. The reaction mechanism of PEALD process was investigated using an in-situ quartz crystal microbalance (QCM) and in-situ quadrupole mass spectrometer (QMS). The precursors was tetrakis(dimethylamino)zirconium (TDMAZ) and the O2 remote plasma.