Strem Chemicals offers ALD & CVD Precursor bubblers and ampoules for R&D and high volume manufacturing

Strem Chemicals, Inc. manufactures and markets specialty chemicals of high purity. Their products are used for research and development, as well as commercial scale applications, especially in the pharmaceutical, microelectronic and chemical/petrochemical industries.

Strem Chemicals has more than fifty years of experience in manufacturing inorganic and organometallic chemicals and probably the world´s most extensive product offering of MOCVD, CVD, and ALD precursors. Continually adding new products for this dynamic and exciting field, their range of products is presented in the on-line catalog (LINK) and include:

• Metal alkyls
• Metal alkylamides and alkylimides
• Metal amidinates
• Metal alkoxides
• Metal β-diketonates
• Metal cyclopentadienyls
• Metal halides
• Volatile organometallics
• Volatile metal carbonyls
• Fluorinated derivatives
• Electronic grade chemicals
• Single source precursors for mixed metal oxides

The standard and absolutely safest way to transport and deliver highly reactive ALD & CVD precursors is in stainless steel ampoules. These are often referred to as bubblers since in many cases they are fitted with a dip tube on the inlet allowing efficient vapor delivery by an inert carrier gas like N2, He or Ar. These bubblers are readily fitted with seal tight valves and VCR vacuum fittings for easy and safe installation directly on the ALD/CVD tool gas box by a qualified person.

In addition to their 450+ precursors, Strem Chemicals offer a variety of electropolished stainless steel bubblers at capacities ranging from 150ml to 3000ml. These bubblers are available in horizontal-in-line and vertical configurations. While standard bubblers are equipped with diaphragm valves rated to 121°C (PCTFE stem tips), Strem also supplies bubblers with high temperature bellows valves rated to 315°C. DOT and UN approved configurations are available.

An assortment of cylinders for ALD can be found in the on-line catalog (LINK) with standard, high-temperature and high-purity options. In addition, Strem Chemicals provides additional services to our customers for their MOCVD, CVD & ALD needs such as:

• Cylinder/Bubbler Cleaning
• Precursor Filling & Refilling
• Prepackaged Precursors in ALD Cylinders

Above, are small sized vapor draw ampoules for research amounts of precursors. The sleek design affords a very compact precursor delivery system.

Bubbler specifications 

Strem Chemicals allows you to match a bubbler to your current ALD or CVD tool gas box. The bubbler can be specified using a vast range of types, dimensions and valve configurations. Depending on the precursor to be supplied the valves, materials and dip tube configuration can be optimized for the most efficient precursor delivery even at elevated temperatures (up to 315 °C).

Strem offers four of the most popular bubbler designs, and can be made to fit inside most of the ALD/CVD tools on the market today as well many custom build systems.

Once you decide your preference of bubbler, you will need to measure the critical dimensions (A to E), such as volume, temperature operation and dip tube configuration. Then you´re ready to order the ideal bubbler filled with your desired precursor. By following the guide you can be sure that the bubbler will fit like a glove into your precursor cabinet!

Example of a bubbler configuration sheet for a stainless steel bubbler fitted with high temperature valves. 

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Promotional Blog for Strem Chemicals, Inc.
Researched, produced & written by BALD Engineering AB, Stockholm, 2019-02-21
Abhishekkumar Thakur, Jonas Sundqvist
www.baldengineering.com