Lund Nano Lab to present new maskless technology for nano device patterning at ALE 2016 Ireland

Semiconductor device scaling requires atomic level precision processing and Atomic Layer Etching (ALE) has a great potential for this. ALE is a cyclic etching process in which a well-defined atomically thin layer is etched in each cycle. [HERALD White Paper on Atomic Level Processing]

Lund Nano Lab at NanoLund, Lund University to present new maskless technology for nano device patterning at ALE 2016 Ireland. Here you can have a preview and we welcome all of you to enjoy the opening pleanary talk by Prof. Lars Samuelson and later the contributed talk by Dr. Dmitry Suyatin in the ALE Workshop. Later you may also want to come and stop by and visit us in the Exhibition at the joint stand NanoLund and ALD Lab Saxony - table 45 right next to the coffee.

Nanowire-based Technologies for Electronics, LEDs and Solar-cells
Lars Samuelson
Lund University, Sweden
08:30-09:00

Dr. Dmitry Suyatin from Lund university presenting initial groundbreaking work on splitting Nanowires by ALE at the Novel High-k Workshop in Dresden 2016. At ALE 2016 more details will be revealed.

Longitudinal nanowire splitting by atomic layer etching
DMITRY B. SUYATIN*, MD SABBIR AHMED KHAN, JONAS SUNDQVIST, ANDERS KVENNEFORS, MARIUSZ GRACZYK, NICKLAS NILSSON, IVAN MAXIMOV
Lund University, Sweden
13:45-14:00

Invention

We provide an ALE-based maskless method of manufacturing nanostructures with characteristic size below 20 nm

Offer

• IP & licencing 
• ALE Process development 
• Device fabrication 
• Process transfer

Washington Nanofabrication Facility to invest $37 million

As reported today by University of Washington : For start-up companies looking to make chips with nanoscale features for sequencing DNA or wafers for industrial barcode printing, the equipment costs to fabricate those parts could easily devour every last dollar of seed funding.

The same goes for grant-funded researchers designing quantum information devices or micro-scale sensors to measure cell movement— which is where theWashington Nanofabrication Facility comes in.

Since the UW started operating the Washington Nanofabrication Facility in 2011, its users have included:

• 84 UW faculty
• 298 students
• 92 companies, including 7 UW spin-outs
• 36 outside academic institutions

The WNF makes things that aren’t practical, economical or possible to fabricate at commercial foundries — inconceivably tiny parts, chips made from unconventional materials that industrial factories won’t touch, devices that probe the boundaries of our universe. Part of the National Nanotechnology Infrastructure Network, the lab on the University of Washington campus is the largest publicly accessible nanofabrication facility north of Berkeley and west of Minneapolis.

To serve growing demand for nanofabrication services, the UW Board of Regents has approved spending up to $37 million to renovate the facility, which is housed in Fluke Hall. The overhaul, scheduled to begin in November, will upgrade basic building systems and roughly double the amount of highly-specialized fabrication space that academics and entrepreneurs increasingly rely on to build innovative devices.

Full story : http://www.washington.edu/news/2015/08/03/uw-to-invest-37-million-in-nanofabrication-lab-critical-to-researchers-start-ups/