Workshop Simulation of chemistry-driven growth phenomena for metastable materials

CECAM/Psi-k/HERALD Workshop
Simulation of chemistry-driven growth phenomena for metastable materials

The controlled growth of thin films based on metastable materials by chemistry-driven processes is of high technological importance for topics like semiconductor devices or optical coatings. Computational modelling of this inherently multiscale process is crucial for an atomistic understanding and enables a decoupling and separate optimization of the growth-determining factors of non-equilibrium materials. This workshop will result in a joint effort by experts from different modelling communities covering the necessary length and time scales.

Main Page : http://www.staff.uni-marburg.de/~simgrow/

The workshop will be held at

Schloss Rauischholzhausen

nearby Marburg in Germany from November 08-11, 2015.

 

Organizers

CECAM		Psi-k		HERALD

Sponsors

GRK 1782		ESF	Dock/Chemicals

The agenda for the ALD Lab Dresden Symposium at SEMICON Europa is now set!

The agenda for the ALD Lab Dresden Symposium is now set! If you are attending and representing a company or any organization with an offering in ALD or ALE - please brig alog your flyers, coffee mugs, hats and pensand I will sort out a table that is bug enought for displaying it.

AGENDA
Tuesday, 6 October 2015
09:00	Welcome	Organized by: Supported by:
	Prof. Johann W. Bartha, TU Dresden
09:15	In situ monitoring of Atomic Layer Deposition in porous materials
	Martin Knaut, TU Dresden
09:40	Passivation of MEMS by Atomic Layer Deposition
	Matthias Schwille, Robert Bosch
10:05	Growth Monitoring by XPS and LEIS Investigations of Ultrathin Copper Films Deposited by Atomic Layer Deposition
	Dileep Dhakal, TU Chemnitz/FhG ENAS
10:30	High-k dielectrics by ALD for BEOL compatible MIM
	Wenke Weinreich, FhG IPMS-CNT
10:55	ALD coatings for applications as permeation barrier and protective layer in fiber-reinforced materials
	Mario Krug, FhG IKTS
11:20	ALD for solar cell application
	Ingo Dirnstorfer, NaMLab
11:45	Plasma enhanced ALD process for TiO2- and WO3- films
	Alexander Strobel, FH Zwickau
12:10	Lunch Break (Conversation, Networking, Finger food)
13:00	Why do we need Atomic Layer Etching
	Jonas Sundqvist, Lund University/TU Dresden
13:25	Spatial Atomic Layer Deposition and Atomic Layer Etching
	Prof. Fred Roozeboom, TU Eindhoven/ TNO Eindhoven
13:50	Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?
	Harm Knoops, Oxford Instruments/TU Eindhoven
14:15	Hardmask and side wall protection during dry etching with plasma enhanced deposition during dry etching for ALE purposes
	Stephan Wege, Plasway
14:40	Industrial High Throughput Atomic Layer Deposition Equipment and Process for OLED Encapsulation
	Jacques Kools, Encapsulix
15:05	Closing Remarks / Wrap Up
	Prof. Johann W. Bartha, TU Dresden
15:10	End

UPDATE- Photo show from Baltic ALD 2015 September 28-29, Tartu, Estonia

Here pictures in social media and that you send to me (jonas.sundqvist@baldengineering.com) will be publish to cover the scientific and social program of The 13th International Baltic Conference on Atomic Layer Deposition will be held in Tartu, Estonia, at the Institute of Physics of the University of Tartu on September 28–29, 2015.

Twitter Hash Tag : #BalticALD

Following the Baltic ALD 2015 Conference, the annual meeting of the COST project HERALD 

(http://www.european-ald.net) will be held at Dorpat Conference Center, Tartu, on September 30, 2015. Please also take picture at this event!

              

SCIENTIFIC PROGRAM:

http://bald2015.ee/program-baltic-ald-2015/schedule/

 Book of abstracts (Riikka Puurunen, VTT, Twitter)

A bus load of ALD scientists from Helsinki heading for the Helsinki-Tartu flight. Last time (2002) they took the bus all the way to Tartu.

Tartu as viewed from the conference Hotel on Sunday afternoon (Irina Kärkkänen, Sentech)

Conference bag - must be the best looking bag ever in the History of ALD (Riikka Puurunen, VTT, Twitter)

 The Russian ALD bag next to the Estonian ALD Bag below the VPHA Poster (Riikka Puurunen, VTT, Twitter)

 Participant distribution - Finland on top followed by Estonia and Germany (Riikka Puuronen, VTT, Twitter)

 View at the podium (Simon Rushworth, EpiValance, LinkedIn)

Modeling area-selective ALD, talk by Simon Elliott Tyndall (Riikka Puurunen, Twitter)

Timo Vähä-Ojala from Picosun talked about modelling of gas flow in ALD reactor (Tero Pilvi, Picosun)

Riikka Puurunen VTT -  Mechanical property mapping of ALD thin films (Christoph Hossbach, TU-Dresden) 

SOCIAL PROGRAM:

"Colours, colours! Physicum building at Tartu University" (Riikka Puurunen,  VTT, Twitter)

 

Welcome Reception September 27, 2015
Conference Dinner September 28, 2015

"Conference dinner at AHHAA science centre was memorable with the pyro show, good food, music, and company" (Riikka Puurunen, VTT, Twitter)

Guided City Tours September, 29, 2015 

SPONSORING

The conference venue showing the Exhibition area for a number of sponsoring companies: Armgate, Picosun, Oxford Instruments, Beneq, STREM Chemicals, SENTECH Instruments, Semilab, FAB Support.

HERALD website with member profiles is going live www.european-ald.net

Check out the new HERALD website with member profiles just went live www.european-ald.net

HERALD promotes European research activity in Atomic Layer Deposition (ALD)

HERALD (COST action MP1402) aims to structure and integrate European research activity in atomic layer deposition (ALD), bringing together existing groups, promoting young scientists and reaching out to industry and the public. ALD is a unique technique for growing ultra-thin films that is enabling new developments in high-tech manufacturing sectors such as electronics, energy and coatings. With interest growing worldwide, the time is right to coordinate European activity in this field. HERALD supports collaboration through lab visits, workshops and training schools.

HERALD Workshop - ALD for Batteries, Gent, Belgium September 15-16

Workshop - ALD for Batteries

Co-organiser 

 

Program

Tuesday, September 15, 2015 - Het Pand

09:30   Registration

10:00   Philippe Vereecken, IMECInvited Talk - Conformal deposition for 3D thin-film batteries: requirements and opportunities

10:45   Sebastien Moitzheim, IMECSpatial ALD of TiO2 for 3D thin-film batteries

11:15   Felix Mattelaer, Ghent University
ALD of Manganese oxides

11:45   Mikko Ritala, University of HelsinkiPreparation of lithium containing ternary oxides by solid state reaction of atomic layer deposited thin films

12:15   Lunch

13:30   Maarit Karppinen, Aalto University
Invited Talk 

14:15   Kevin van de Kerckhove, Ghent University
Molecular Layer Deposition of Titanicone

14:45   Miia Mäntymäki, University of Helsinki

15:15   Break

15:45   Adriana Creatore, TU Eindhoven
Invited Talk - Plasma ALD of Li-based materials

16:30   Thomas Dobbelaere, Ghent University
ALD of phosphates

17:00   Closing remarks

Wednesday, September 16, 2015 - Dept. Solid State Sciences

09:00   Ola Nilsen, University of Oslo
Invited Talk - ALD of Li-containing compounds

09:45   Amund Ruud, University of Oslo
High rate iron phosphates by ALD

10:15   Break

10:45   Ruud Van Ommen, TU Delft
ALD on battery particles

11:30   Geert Rampelberg, Ghent University
Thermal and plasma enhanced ALD on powders

12:00   Lunch

13:30   Tour of the Lab 

Registration

Participation is free of charge (limited number of places):https://webapps.ugent.be/eventManager/events/cocoonworkshopbatteries

Registration will be possible from 1 July 2015. Please register before 1 September 2015. 

Location

The workshop takes place at Het Pand (on Tuesday) and the department of Solid State Sciences (on Wednesday).

Tuesday, September 15, 2015

Het Pand, Ghent University
Onderbergen 1
9000 Gent, Belgium

By public transport:

• From station Gent Sint-Pieters:Tram 1 (every 6 minutes) or tram 24 (every 20 minutes). Exit at Korenmarkt.
• From Gent ZuidTram 4 (every 6 minutes), tram 24 (every 20 minutes) or bus 17 (every 30 minutes). Exit at Korenmarkt.

By Car:

• Follow the parking signage to parking P7 Sint-Michiels. The parking is located at 50 meter from Het Pand. Take the exit Onderbergen and you come out in the wilderoosstraat, opposite Het Pand.
• An alternative parking is P8 Ramen. From here it's about 5 minutes on foot to Het Pand.

Wednesday, September 16, 2015

Department of Solid State Sciences, Ghent University
Krijgslaan 281 - Building S1
9000 Gent, Belgium

How to reach us

Contact

Department of Solid State Sciences, Ghent University

Krijgslaan 281 - Building S1
9000 Gent, Belgium

Phone: +32 (0)9 264 43 54
Fax: +32 (0)9 264 49 96

E-mail: Christophe.Detavernier@UGent.be

Flyer

Download here

Sponsors

 

HERALD events in 2015

HERALD (COST action MP1402) aims to structure and integrate European research activity in atomic layer deposition (ALD), bringing together existing groups, promoting young scientists and reaching out to industry and the public.

So far, over a 100 researchers from academia and industry are taking part in HERALD and we welcome new members.  If your country is participating already, you can simply join our LinkedIn group. Please visit the current web page for the latest information. Below is a summar table of the activities and events in 2015. 

Chair of the HERALD action: Dr Simon Elliott, Tyndall National Institute, email: simon.elliott -at- tyndall.ie 

 

 

HERALD events in 2015
Co-organised workshop	Novel High k Application Workshop	9-10 Mar 2015	Dresden, DE
WG1 workshop	Workshop on ALD fundamentals and reaction mechanisms	8-9 Jun 2015	Eindhoven, NL
Training school	Atomic Layer Deposition: method and applications	6-7 Jul 2015	Brescia, IT
Co-organised conference	20th Biannual European Conference on Chemical Vapour Deposition (EUROCVD20)	13-17 Jul 2015	Sempach, CH
WG4 workshop	Workshop on ALD applications for battery materials	15-16 Sep 2015	Gent, BE
Co-organised conference	Baltic ALD conference	28-29 Sep 2015	Tartu, ES
Action meeting	Annual HERALD Day	30 Sep 2015	Tartu, ES
Co-organised workshop and training school	ALD Symposium at SEMICON Europa	6-8 Oct 2015	Dresden, DE
Co-organised workshop	Simulation of chemistry-driven growth phenomena for metastable materials	8-11 Nov 2015	Marburg, DE