Webinar RIE and ALE Processes for Quantum Devices

Optimise the Fabrication Process for Quantum Devices, 2nd December, 4 pm (GMT)

Dr Russ Renzas, Quantum Technology Market Manager

The fabrication of superconducting qubits, quantum photonic elements and diamond-based quantum sensors require highly controlled, stable processes that will not damage the surface and leave no residues. Plasma-based Reactive Ion Etch and Atomic Layer Etch processes are critical for the fabrication of these quantum devices.

In this webinar, Dr Russ Renzas will give an overview of the available plasma etch solutions and how each one of them can be used to overcome some of the processing roadblocks, providing specific examples of how they are applied during the fabrication process

This webinar will give an introduction of:

• The various etch platforms that are available and their differences
• How each etch system can be used to overcome some of the processing roadblocks
• Quantum-specific examples of what can be done and why it should be done during device fabrication process

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