Monday, September 7, 2020

Intermolecular - Inherently Ferroelectric Films by ALD Using ZrD-04 and HfD-04

Intermolecular, now part of MERCK, is updateing their R&D research/news blog on regular basis. Here is recent (ALD2020) presentaion on the results of Vijay Kris Narasimhan's research that provide a pathway to developing ferroelectric devices in which the electrodes and thermal processing conditions of the entire stack can be optimized independently with minimal effects on the ferroelectric layer.

Learn more (including embedded PowerPoint presentation): LINK



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