Tuesday, September 26, 2017

The 6th ALD Lab Saxony Symposium at the SEMICON Europe 2017 in Munich, Germany

Please be invited to participate in the annual ALD Lab Saxony Symposium at SEMICON Europa on the 14th of November (10:00 to 15:00) in Munich Germany. The event is free of charge for all visitors to SEMICON Europa and we are very thankful for the sponsoring from Picosun Oy (Platiunum). TECHCET LLC (Gold) and Pegasus Chemicals (Silver).



Confirmed Presentations:

ALD Labs:
  • „Fabrication of 3D microstructures from micron-sized powder using ALD and possible applications for MEMS”, Dr. Thomas Lisec, Fraunhofer ISIT (Germany)
  • „Passivation, Capacitors or 3D-Structures – Outline the Possibilities of ALD”, Dr. Dorothee Dietz, Fraunhofer IMS (Germany)
  • „ALD equipment and precursors for high volume manufacturing”, Dr. Jonas Sundqvist, Fraunhofer IKTS (Germany) 
  • „In-situ metrology for ALD“ Dr. Martin Knaut, IHM TU Dresden (Germany)
  • „ALD process optimization using computational fluid dynamics” Linda Jäckel, Fraunhofer ENAS (Germany)
Industry:

  • „ALD for Production“, Dr. Christoph Hossbach, Picosun Oy (Finland)
  • „Electronics: a key market for Umicore - a key partner for the market” Oliver Briel, Umicore (Germany)
  • „Supply chain of critical materials fro the semiconductor industry”, Dr. Diane Scott, TECHCET LLC (USA)
  • „Precursor delivery systems for ALD & CVD”, Daniel Schlamm, SEMPA Systems GmbH (Germany)