Here is an excellent workshop at RWTH Aachen that I visited once organized by Oxford Instruments. Now this is a full 2 day event with a lot of interesting talks and tutorials on plasma processing including ALD offcourse.
Workshop on dry processing for Nanoelectronics and Micromechanics: deposition and etching
by Oxford Instruments Plasma Technology and RWTH AachenLINK: http://www.oxfordplasma.de/data/workshop.htm
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