Back to Basics: Understanding Conformality with Riikka Puurunen – ALD Stories Ep. 14

Back for her second episode, Professor Riikka Puurunen is bringing us back to the basics with a deep dive on conformality. Recorded live from the Harald Herlin Learning Center at Aalto University, Tyler and Riikka talk about the all-important property of ALD. In this episode, Riikka explains the history of conformality in ALD, her recent paper on modeling collaboration, the origins of the PillarHall conformality test structures, and a conversation on open science.

One question came up, when was ALD first used for high aspect-ratio DRAM capacitors? It was 2004 by Samsung Samsung begins making DRAMs on 90-nm process - EETimes

Chipmetrics has commercialized the PillarHall test chip and more information can be found here: Chipmetrics

PillarHall – introduction in SlideShare

PillarHall – introduction in YouTube

PillarHall – short introduction in YouTube

Video: How to use PillarHall test chip

PillarHall Web Site

Chipmetrics at ALD 2022 in Ghent.