Wednesday, September 13, 2017

RWTH / Oxford Instruments Workshop on dry processing for Nanoelectronics and Micromechanics

Here is an excellent workshop at RWTH Aachen that I visited once organized by Oxford Instruments. Now this is a full 2 day event with a lot of interesting talks and tutorials on plasma processing including ALD offcourse.

Workshop on dry processing for Nanoelectronics and Micromechanics: deposition and etching 

by Oxford Instruments Plasma Technology and RWTH Aachen

LINK: http://www.oxfordplasma.de/data/workshop.htm