Wednesday, July 3, 2019

Aixtron delivers 3x2" CCS MOCVD system to Nagoya University for DUV opto device research

Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has delivered a Close Coupled Showerhead (CCS) system to Nagoya University in Japan. Installed at the university’s Institute of Materials and Systems for Sustainability (IMaSS), the 3x2-inch Flip Top CCS metal-organic chemical vapor deposition (MOCVD) platform is intended for research on gallium nitride (GaN)-based deep-ultraviolet (DUV) optoelectronic devices.

Nagoya University is a leading Japanese research institution for semiconductor materials, especially in the field of GaN-based structures. By focusing on the development of DUV devices using Aixtron’s 3x2-inch Flip Top CCS MOCVD tool, IMaSS is targeting a wide range of future-oriented applications in areas such as agriculture, health or water purification.
Source: Semiconductor TodayLINK

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