A new review paper on ALD on particles

Here is a new review paper on ALD on particles with special focus on the reactor designs - very interesting topic.

Reactor concepts for atomic layer deposition on agitated particles: A review

Delphine Longrie, Davy Deduytsche and Christophe Detavernier
J. Vac. Sci. Technol. A 32, 010802 (2014)

LINK

The article covers, agitation or fluidization of the particles is necessary for performing ALD on (nano)particles. The principles of gas fluidization of particles will be outlined, and a classification of the gas fluidization behavior of particles based on their size and density will be given. Following different reactor concepts that have been designed to conformally coat (nano)particles with ALD will be described, and a concise overview will be presented of the work that has been performed with each of them ending with a concept reactor for performing spatial ALD on fluidized particles.

I. INTRODUCTION
II. ALD ON STATIC PARTICLES
A. Particles supported in a grid
B. Particles contained in a crucible
1. Calculations for particles contained in a crucible
III. GAS FLUIDIZATION OF PARTICLES
A. Fundamentals
B. Classification of fluidized particles
IV. ALD ON FLUIDIZED PARTICLES
V. ALD ON AGITATED PARTICLES
A. Rotary reactor for thermal ALD on particles
B. Rotary reactor for plasma-enhanced ALD on particles
VI. SPATIAL ALD ON PARTICLES

Veeco Promo Video for FAST-ALD(TM)

Veeco Instruments Inc. announced in end of 2013 that they have signed an agreement to acquire privately held Synos Technology, Inc. It seems that it is a done deal today and therefore Veeco recently reported on the Key Benefits of FAST-ALD(TM), a type of Spatial ALD:

- Ultra-fast ALD process with continuous substrate scan
- Large substrate scalability without losing process throughput
- Excellent uniformity with closed loop linear reactor design
- Low CoO with high efficient gas-solid reaction process
- Simultaneous In-line multi-process capability

 

 

Screen dump from http://www.veeco.com/promos/fast-ald.aspx 2014-01-12

See more and watch an amazing Veeco Promo Video for FAST-ALD(TM) for Flexible OLED Display at LINK
Spatial ALD is big business today. You can assume that it is contributing to the growth in the ALD market that has been and is forecasted to come the next 5 years. Therefore, stay tuned here on the Best ALD News Blog, information on other Spatial ALD Companies, Innovations and Technologies will be updated:

- Spatial ALD papers, Spatial ALD research from TNO and others
- First spatial patents and very recent patents
- Kodak
- Solaytec
- Jusung
- Levitech
- Beneq
- Roll to Roll Spatial ALD

Please Email any ideas or information to jonas.sundqvist@baldengineering.com