Sunday, August 17, 2014

Aixtrons OEC-200 cluster platform includes an ALD process module

AIXTRON supplies deposition equipment to the semiconductor industry. The company's technology solutions are used by a diverse range of customers worldwide, enabling them to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials, for polymers, as well as carbon nanotubes (CNT), graphene and other nanomaterials. For the deposition of organic thin films, AIXTRON offers two core technologies for mass production and R&D: AIXTRON’s Organic Vapor Phase Deposition (OVPD®) equipment serves as enabling technology for the deposition of organic small molecules for OLEDs and organic semiconductor solutions. With its line of Polymer Vapor Phase Deposition (PVPD®) equipment, AIXTRON also offers solutions for carrier gas enhanced vapor phase deposition of functional polymer thin films for a variety of applications, for instance for the manufacturing of functional layers for OTFTs, electro-wetting displays and others. The OVPD-200 system incorporates latest improvements for Organic Vapor Phase Deposition and offers modular source configuration. The new PRODOS-200 provides a powerful evaluation platform for Polymer Vapor Phase Deposition processes. Both solutions can be integrated with the novel OEC-200 cluster platform. Providing a range of integration components such as transfer modules, load locks, buffers, and other subsystems, the OEC-200 platform allows to integrate OVPD -200 and PRODOS-200 into automated cluster environments.”

Aixtron recently relased a video of this Organic Lab at R&D Center OLED Demo Cluster & Gen8 Demo Module. If you watch it you will also notice that it includes an ALD process module!

Aixtrons OEC-200 cluster platform (screendump)

Close up on the ALD process module (screendump) 

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