Showing posts with label ALD Labs. Show all posts
Showing posts with label ALD Labs. Show all posts

Saturday, April 18, 2015

Spring at ALD Lab Dresden

Yesterday I met with Prof. Bartha at IHM, TU Dresden, to plan for this years ALD Lab Dresden Symposium at SEMICON Europa October 6 to 8. There will be som news for this year so stay tuned for more information!

TU Dresden, Fakultät Elektrotechnik und Informationstechnik, Institut für Halbleiter- und Mikrosystemtechnik


The competence center in Atomic Layer Deposition - The  ALD  Lab  Dresden  is  a  collaboration  of Research institutes in Dresden applying  and developing atomic layer deposition (ALD)

Saturday, October 4, 2014

The Stanford Nanofabrication Facility Labmembers Wiki

The Stanford Nanofabrication Facility has a SNF Labmembers Wiki open to read for everyone describing all equipment and processes they are operating - impressive! : "This wiki site is for and by the SNF lab community. It's a resource for working inside the lab, serving as a dynamic reference as well as historical archive. For more general topics about SNF (such programs in education, how to join, directions, history) please see the Stanford Nanofabrication Facility Home Page.  A login is not needed to view public information, only to contribute.  If you are a labmember wishing to contribute, contact an SNF staff member for access."
 
 
Some useful ALD information that I found while surfing around among other equipment for nanofabrication : 
 
 
Detailed information on ALD tools and processes operated by SNF:
  • Savannah S200 from Cambridge Nanotech/Ultratech
  • A system called MVD that is a system consisting of a glovebox, plasma cleaner, and Savannah ALD tool which is used to deposit organic SAMS layers
  • 3(!) Fiji ALD system from Cambridge Nanotech/Ultratech dedictaed for different processes
ALD introductory tutorial and In-depth tutorial presented by Dr. J Provine 11/1/12 at Stanford University
 
 
A system called MVD that is a system consisting of a glovebox, plasma cleaner, and Savannah ALD tool which is used to deposit organic SAMS layers (picture from SNF wiki)
 
 
 
Tour of the Stanford Nanofabrication Facility we look at some of the key steps and equipment involved in nanofabrication. at 09:45 the introduce ALD and a Fiji reactor and starting a run on a Savannah. (Youtube).