Thursday, January 27, 2022

ALD InGaN with single precursor pulse of In & Ga

Polla Rouf of Pedersen Group in Linköping Sweden, just published an ALD approach to metastable In1−xGaxN with 0.1 < x < 0.5 based on solid In- and Ga-precursors that were co-sublimed into the deposition chamber in one pulse. A near In0.5Ga0.5N film with a bandgap value of 1.94 eV was achieved on a Si(100) substrate. Epitaxial In1−xGaxN(0002) was successfully grown directly on the 4H–SiC(0001) substrate.

I checked in with Prof. Pedersen on Twitter and this is gonna be one of the abstract submitted to AVS ALD 2022 in Ghent this summer.

  • The sequential pulsing of the precursors in ALD presents a challenge to depositing a homogeneous ternary material as only one precursor can be pulsed into the reactor at a time.
  • Ternary materials are therefore deposited by ALD as stacks of two binary materials. In1−xGaxN could therefore be deposited as layers of InN and GaN in an ABAB⋯CBCB… super-cycle approach where A and C are In- and Ga-precursors, respectively, and B is the N-reactant. By varying the number of cycles for each binary material, the overall composition of the ternary material can be tuned. 
  • This approach relies on diffusion of the two binary materials to form a homogeneous ternary phase. Otherwise, a multilayer of InN/GaN is obtained. This ALD approach has been used to obtain In1−xGaxN with x ranging from 0.15–0.85 using trimethylindium and trimethylgallium.
  • Here, an alternative method to depositing ternary materials by introducing both metal precursors with a single pulse. This renders mixing of the metals in both the growth direction and in the growth plane. This was achieved by mixing and co-subliming two solid metal precursors into the ALD chamber.







10 comments:

  1. no doubt your article seems very interesting and informative and right now I'm quite busy because I'm helping my younger sister in finding a research data collection services, once I'm done with it I'll read your whole article.

    ReplyDelete
  2. I saw some testimonies about this herbal specialist called @drmosesbuba and decided to email him so I gave his herbal product a try. i emailed him and he get back to me and we discussed, he gave me some comforting words and encouraged me also and then gave me his herbs and cream for Penis Enlargement Within 1 week of it, i began to feel the enlargement of my penis, " and now it just 2 weeks of using his products my penis is about 10 inches longer and am so happy today. Contact @drmosesbuba for any problem via WhatsApp +2349060529305 or email buba.herbalmiraclemedicine@gmail.com

    Thanks doctor Moses

    ReplyDelete
  3. Hey guys! I really ant to recommend you a pretty service for essay writing and homework! If you do not know to discover a help, just write https://topswriting.com/review/academized and be sure that this guys know how to do it! Check this out!

    ReplyDelete
  4. Utilize a 25 % OFF Boden markdown code NHS deal and voucher code UK with free conveyance on dresses, swimwear and more at boden NHS discount code.boden NHS discount

    ReplyDelete
  5. Look at our scope of equestrian shops near me including horse carpets, riding boots and all the other things for the pony and rider. equestrian shops near me

    ReplyDelete
  6. Qualified bookkeepers giving significant level internet bookkeeping administrations to organizations in certaxlondon and the UK, assisting them with remaining consistent. uk accounting services

    ReplyDelete
  7. I am reading an essay written on the I-T department, and modern technology is introducing new software that can be used for future life. I will try to read more about your views because I want to share my services of buy dissertation online

    ReplyDelete
  8. Without a question, your essay seems to be really intriguing and useful. However, I'm currently rather busy helping my younger sister find an academic writing service Uk , so I won't have time to read your entire article till I'm finished.

    ReplyDelete
  9. Now you can get discounted vouchers and coupons easily by Wadav.de

    ReplyDelete