Thursday, November 16, 2017

Beneq present ALD Throughput Revolution in More than Moore Markets

At Semicon Europa, the largest microelectronics event in Europe, 14-17, November, Munich, Germany, Beneq launched the Beneq C-Series, a new Cluster-Compatible ALD product family for high-volume manufacturing of wafers. This is the start of a throughput revolution for ALD in new More than Moore wafer processing markets. 

Beneq C2 is a cluster-compatible automated wafer ALD system for industrial processing of wafers. It is available both as a single-wafer version and as batch-processing equipment for high volume manufacturing. Beneq C2 offers a unique combination of high capacity batch processing and standard cassette-to-cassette automation. Each process module on the cluster can process up to 30 000 wafer passes per month(200 mm wafers). []

Please find more detailed information in the press release from Bebeq [LINK]

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