The ALD throughput revolution for the new More than Moore markets continues at Semicon Europa. Stop by the Home of ALD (stand 1767, Hall B1) and check our new cluster-compatible products: Beneq C2 and Beneq C3R for fast ALD on wafers. #SEMICONEuropa #throughputrevolution pic.twitter.com/jU87rlLr6U— Beneq Corporation (@beneqcorp) November 14, 2017
Thursday, November 16, 2017
Beneq present ALD Throughput Revolution in More than Moore Markets
At Semicon Europa, the largest microelectronics event in Europe, 14-17, November, Munich, Germany, Beneq launched the Beneq C-Series, a new Cluster-Compatible ALD product family for high-volume manufacturing of wafers. This is the start of a throughput revolution for ALD in new More than Moore wafer processing markets.
Beneq C2 is a cluster-compatible automated wafer ALD system for industrial processing of wafers. It is available both as a single-wafer version and as batch-processing equipment for high volume manufacturing. Beneq C2 offers a unique combination of high capacity batch processing and standard cassette-to-cassette automation. Each process module on the cluster can process up to 30 000 wafer passes per month(200 mm wafers). [beneq.com]
Please find more detailed information in the press release from Bebeq [LINK]