Thursday, October 19, 2017

Conductance measurements optimize atomic layer deposition automatically

As reported by An in situ measurement technique that can monitor the process of atomic layer deposition (ALD) in real time has been developed by scientists in Germany. The researchers used changes in the conductance of layers over multiple ALD cycles to identify the different growth phases as they occurred, allowing undesired modes of deposition to be averted. The conductance signal was also used as the input to a genetic algorithm that could optimize the growth rate semi-automatically.