Friday, September 1, 2017

SPTS etch deposition and thermal equipment for semiconductor industry

You learn something everyday - here is an interesting blog on MEMS wafer level packaging are silicon capping and thin film encapsulation, each providing benefits for specific packaging applications by SPTS.

SPTS etch deposition and thermal equipment for semiconductor industry: SPTS etch deposition and thermal equipment for semiconductor industry.

Schematic illustration of capping wafer bonded to MEMS wafer (Picture SPTS)