Tuesday, April 25, 2017

JVST A Special Issues | Atomic Layer Deposition & Etching Due Sept. 5

JVST A is Soliciting Research Articles for Publication in a Special January/February 2018 Issue on Atomic Layer Deposition and Atomic Layer Etching


These special issues are planned in collaboration with ALD 2017 Conference and the ALE Workshop being held in Devner, Colorado, July 15-18, 2017 . The Special Issues will be dedicated to the science and technology of atomic layer controlled deposition of thin films. While a significant fraction of the articles expected are to be based on material presented at ALD 2017 and the ALE Workshop, research articles that are on ALD and ALE but not presented at this conference are also welcome: the special issue will be open to all articles on the science and technology of ALD and ALE.