A very warm welcome to RASIRC as a new sponsor of the BALD Engineering ALD news blog! RASIRC based in San Diego California specializes in products that generate and deliver gas to fabrication processes. Each unit is a dynamic gas plant in a box—converting common liquid chemistries into safe and reliable gas flow for most processes. First to generate ultra-high purity (UHP) steam from de-ionized water, RASIRC technology can now also deliver hydrogen peroxide gas in controlled, repeatable concentrations.
RASIRC products that are in use for ALD include:
- Peroxidizer® for high concentration hydrogen peroxide gas
- RainMaker Humidification System to humidify gases
- Steamers for ultra high purity steam
Next on the CMC Confernce 5-6th of May in Hillsoboro, Dan Alvarez, Chief Technology Officer of RASIRC will present their new technology for Hydrazine delivery in a talk entitled: "Hydrazine as a Low Temperature Nitride Source: Materials Challenges for High Volume Manufacturing"
You will be reading more about RASIRC here in the near future!
RASIRC: http://www.rasirc.com
No comments:
Post a Comment