Saturday, February 13, 2016

UPDATE: HERALD "ALD Precursors and processes" Workshop May 23-24 in Helsinki, Finland

Finnish Centre of Excellence in ALD (ALDCoE) welcomes you to a combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE to be held May 23-24, 2016 in Helsinki, Finland. The topics of the two-day event will include precursor and process development, including in situ studies, for ALD. Invited talks and poster contributions from both industry and academia will give a broad overview on the latest advancements on the topic.

Woorkshop on ALD Precursors and processes 

For more details and registration, go to: http://www.aldcoe.fi/herald/index.html Registration is free of charge (number of attendees is limited) and now open at the event website. Check out also the available sponsorship opportunities. 
Workshop chair: Markku Leskelä

Confirmed Invited Speakers:

Prof. Jaan Aarik, University of Tartu
Prof. Christophe Detavernier, Ghent University
Prof. Erwin Kessels, Eindhoven University of Technology
Prof. Marc Heyns, IMEC
Prof. Anjana Devi, Ruhr University Bochum
Prof. Shi Woo Rhee, POSTECH
Dr. Simon Rushworth, EpiValence
Dr. Paul Williams, Pegasus Chemicals
Dr. Dennis Hausmann, Lam Research
Dr. Tiina Sarnet, Picosun
Dr. Andy Zauner, Air Liquide

Program: http://www.aldcoe.fi/herald/program.html