Tuesday, January 5, 2016

ALD & CVD Metal Manganese Precursors from Canada



The other day we had a paper by Barry Lab on how to make your own gold ALD precursor and now here another hot topic in ALD & CVD of Metal Manganese and for sure also this paper is from Canada as well! Manganese is being evaluated by Intel, Imec and others for sub 10 nm Cu barrier in BEOL metallization. Even if those barriers are just a couple of nano meters thin it is big business since the potential in BEOL is huge if the processes were to be used for a multiple wafer passes of the BEOL Cu metallization. Recently at 20/14 nm. It will be interesting to follow if Manganese will put up a fight against Cobalt or the slugger Ruthenium for future interconnect barriers and Cu caps.

Base-Free and Bisphosphine Ligand Dialkylmanganese(II) Complexes as Precursors for Manganese Metal Deposition

Jeffrey S. Price, Preeti Chadha, and David J. H. Emslie
Organometallics, Article ASAP, DOI: 10.1021/acs.organomet.5b00907
Publication Date (Web): December 30, 2015

 


 
Graphical abstract
 

The solid-state structures and the physical, solution magnetic, solid-state magnetic, and spectroscopic (NMR and UV/vis) properties of a range of oxygen- and nitrogen-free dialkylmanganese(II) complexes are reported, and the solution reactivity of these complexes toward H2 and ZnEt2 is described. The compounds investigated are [{Mn(μ-CH2SiMe3)2}] (1), [{Mn(CH2CMe3)(μ-CH2CMe3)2}2{Mn(μ-CH2CMe3)2Mn}] (2), [Mn(CH2SiMe3)2(dmpe)] (3; dmpe = 1,2-bis(dimethylphosphino)ethane), [{Mn(CH2CMe3)2(μ-dmpe)}2] (4), [{Mn(CH2SiMe3)(μ-CH2SiMe3)}2(μ-dmpe)] (5), [{Mn(CH2CMe3)(μ-CH2CMe3)}2(μ-dmpe)] (6), [{Mn(CH2SiMe3)(μ-CH2SiMe3)}2(μ-dmpm)] (7; dmpm = bis(dimethylphosphino)methane), and [{Mn(CH2CMe3)(μ-CH2CMe3)}2(μ-dmpm)] (8). Syntheses for 14 have previously been reported, but the solid-state structures and most properties of 24 had not been described. Compounds 5 and 6, with a 1:2 dmpe/Mn ratio, were prepared by reaction of 3 and 4 with base-free 1 and 2, respectively. Compounds 7 and 8 were accessed by reaction of 1 and 2 with 0.5 equiv or more of dmpm per manganese atom. An X-ray structure of 2 revealed a tetrametallic structure with two terminal and six bridging alkyl groups. In the solid state, bisphosphine-coordinated 38 adopted three distinct structural types: (a) monometallic [LMnR2], (b) dimetallic [R2Mn(μ-L)2MnR2], and (c) dimetallic [{RMn(μ-R)}2(μ-L)] (L = dmpe, dmpm). Compound 3 exhibited particularly desirable properties for an ALD or CVD precursor, melting at 62–63 °C, subliming at 60 °C (5 mTorr), and showing negligible decomposition after 24 h at 120 °C. Comparison of variable-temperature solution and solid-state magnetic data provided insight into the solution structures of 28. Solution reactions of 1-8 with H2 yielded manganese metal, demonstrating the thermodynamic feasibility of the key reaction steps required for manganese(II) dialkyl complexes to serve, in combination with H2, as precursors for metal ALD or pulsed CVD. In contrast, the solution reactions of 18 with ZnEt2 yielded a zinc–manganese alloy with an approximate 1:1 Zn/Mn ratio.