Thursday, June 11, 2015

ALD Tutorial Speakers & Topics at AVS ALD 2015 in Portland

The tutorials for AVS ALD 2015 looks vey interesting indeed - word class ALD experts and speakers from Intel, University of Helsinki, SAFC, Samsung, IBM and Purdue University!

Tutorial Speakers & Topics 

The Tutorial will be held after noon on Sunday, June 28, 2015 at the Portland Hilton. The registration fee will include breaks and course materials.


11:30 a.m.- 12:30 p.m.


12:30p.m.- 1:15 p.m.

Patricio E Romero, Intel, “Early stage ALD and CVD precursor development at Intel”

1:15 p.m.- 2:00 p.m.

Markku Leskelä, University of Helsinki, Finland, “ALD Process Development: Solutions to Industrial Challenges”

2:00 p.m.- 2:15 p.m.


2:15 p.m.- 3:00 p.m.

Ravi Kanjolia, SAFC Hitech, "Lab to Fab: Precursor Development for Semiconductor Applications"

3:00 p.m.- 3:45 p.m.

HanJin Lim, Samsung Electronics, “ALD Technologies and Applications in Semiconductor Device Fabrication”

3:45 p.m.- 4:30 p.m.

Theodorus Standaert, IBM, “Challenges in BEOL Technology and Opportunities for ALD Processing"

4:30 p.m.- 4:45 p.m.


4:45 p.m.- 5:30 p.m.
Peide D. Ye, Purdue University, “ALD for Novel Device Technologies”

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