Saturday, May 24, 2014

Video explaining The Beneq TFS 200 Thin Film System for ALD

As recently published by Beneq: The Beneq TFS 200 Thin Film System for atomic layer deposition (ALD) is the most flexible and upgradable ALD system on the market. Some of its features include:
  • Up to 3 liquid sources
  • 8 gas lines
  • Hot sources
  • Thermal reaction chamber with load lock

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